| Model | VK-X1050 | |
| Type | measurement head | |
| Total magnification | Up to 28,800 x*1 | |
| Field of view (minimum range) | 11 to 7,398 µm | |
| Frame rate (laser measurement speed) | 4 to 125 Hz, 7,900 Hz*2 | |
| Measurement principle | Optical system | Pinhole confocal optical system, Focus variation |
| Light-receiving element | 16-bit sensing: photomultiplier, High-definition colour CMOS | |
| Scanning method (during general measurement and image stitching) | Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan) | |
| Height measurement | Display resolution | 5 nm |
| Linear scale | ||
| Dynamic range | 16 bits | |
| Repeatability ? | Laser confocal | 20 x, 40 nm; 50 x, 20 nm |
| Focus variation | 5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 30 nm | |
| Height data acquisition range | 0.7 million steps | |
| Accuracy | 0.2 + L /100 µm or better*3 | |
| Width measurement | Display resolution | 10 nm |
| Repeatability 3? | Laser confocal | 20 x, 100 nm; 50 x, 50 nm |
| Focus variation | 5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 65 nm | |
| Accuracy | ±2 %*3 | |
| XY stage configuration | Manual: Moving range | 70 mm x 70 mm |
| Motorised: Moving range | 100 mm x 100 mm | |
| Observation | Image options | High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image) |
| Illumination | Ring illumination, coaxial illumination | |
| Laser light source for measurements | Wavelength | Red semiconductor laser, 661 nm |
| Maximum output power | 1 mW | |
| Laser class | Class 2 laser product (IEC60825-1) | |
| Power supply | Power voltage | 100 to 240 VAC, 50/60 Hz |
| Current consumption | 150 VA | |
| Weight | Approx. 13.0 kg | |
| *1 23 inch full-screen display. *2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. *3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher). |
Измерительная система Keyence VK-X1050
Measurement head: Red semiconductor laser
Описание
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