| Model | IM-7010 | |
| Type | Head Model incorporating backlighting/fixed ring-illumination unit | |
| Image sensor | 1” 6.6 mega pixel monochrome CMOS | |
| Display | 10. 4” LCD monitor (XGA: 1024 ? 768) | |
| Receiver lens | Double telecentric lens | |
| Image measurement | Field of view | Wide-field measurement mode: 200 mm ? 200 mm (4 ? R50) High-precision measurement mode: 125 ? 125 mm |
| Minimum display unit | 0.1 µm | |
| Repeatability | W/o stage movement | Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm |
| With stage movement | Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm | |
| Measurement accuracy (±2?) | W/o binding | Wide-field measurement mode: ±5 µm*1 High-precision measurement mode: ±2 µm*2 |
| With binding | Wide-field measurement mode: ± (7 + 0.02 L) µm*3 High-precision measurement mode: ± (4 + 0.02L) µm*4 | |
| External remote input | Non-voltage input (with and without contact) | |
| External output | OK/NG/FAIL/MEAS. | PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower |
| Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
| USB 2.0 series A | 6 ports (front: 2, rear: 4) | |
| Record | Hard disk drive | 500 GB |
| Illumination system | Transparent | Telecentric transparent illumination |
| Ring | Four division ring illumination | |
| XY stage | Moving range | 100 ? 100 mm (electric) |
| Withstand load | 5 kg | |
| Z stage | Moving range | 75 mm (electric) |
| Power supply | Power voltage | 100 to 240 VAC 50/60 Hz |
| Power consumption | 430 VA or lower | |
| Environmental resistance | Pollution degree | 2 |
| Overvoltage category | II | |
| Ambient temperature | +10 to +35 °C | |
| Relative humidity | 20 to 80 % RH (No condensation) | |
| Weight | Approx. 30 kg | |
| *1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *3 In the range of 180 ? 180 mm (4 ? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of 120 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) |
Измерительная система Keyence IM-7010
Measurement Head
Описание
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