| Model | IM-7000*1 | |
| Type | Controller | |
| Image sensor | 1” 6.6 mega pixel monochrome CMOS | |
| Display | 10. 4” LCD monitor (XGA: 1024 ? 768) | |
| Receiver lens | Double telecentric lens | |
| Image measurement | Field of view | Wide-field measurement mode: 200 mm ? 200 mm (4 ? R50) High-precision measurement mode: 125 ? 125 mm |
| Minimum display unit | 0.1 µm | |
| Repeatability | W/o stage movement | Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm |
| With stage movement | Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm | |
| Measurement accuracy (±2?) | W/o binding | Wide-field measurement mode: ±5 µm*2 High-precision measurement mode: ±2 µm*3 |
| With binding | Wide-field measurement mode: ± (7 + 0.02 L) µm*4 High-precision measurement mode: ± (4 + 0.02L) µm*5 | |
| Light probe Measurement | Measurable area (XY) | 90 ? 90 mm |
| Maximum measurement depth | 30 mm | |
| Light probe diameter | o3 mm | |
| Measuring force | 0.015 N | |
| Repeatability | ±2 µm*6 | |
| Measurement accuracy | ± (8 + 0.02 L) µm*7 | |
| External remote input | Non-voltage input (with and without contact) | |
| External output | OK/NG/FAIL/MEAS. | PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower |
| Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
| USB 2.0 series A | 6 ports (front: 2, rear: 4) | |
| Record | Hard disk drive | 500 GB |
| Illumination system | Transparent | Telecentric transparent illumination |
| Ring | Four division ring illumination (IM-7010) Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric) (IM-7020) | |
| XY stage | Moving range | 100 ? 100 mm (electric) |
| Withstand load | 5 kg | |
| Z stage | Moving range | 75 mm (electric) |
| Power supply | Power voltage | 100 to 240 VAC 50/60 Hz |
| Power consumption | 430 VA or lower | |
| Environmental resistance | Pollution degree | 2 |
| Overvoltage category | II | |
| Ambient temperature | +10 to +35 °C | |
| Relative humidity | 20 to 80 % RH (No condensation) | |
| Weight | Approx. 8 kg | |
| *1 Light probe measurement (IM-7020 only) *2 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *3 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *4 In the range of 180 ? 180 mm (4 ? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) *5 In the range of 120 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) *6 When the detection system is standard. If the detection system is at a deep position, then ±3 µm *7 When the detection system is standard, and the ambient temperature is 23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm. |
Измерительная система Keyence IM-7000
Controller
Описание
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